| 发明名称 | Electrostatic chuck apparatus | ||
| 摘要 | An electrostatic chuck apparatus including: an electrostatic chuck section having one main surface that is a mounting surface on which a plate specimen is mounted, and being equipped with an electrostatic adsorbing internal electrode; and a temperature adjusting base section that adjusts the electrostatic chuck section to a desired temperature, wherein a heating member is bonded to a main surface of the electrostatic chuck section, which is opposite to the mounting surface, via an adhesive material, the whole or a part of the main surface of the temperature adjusting base section, which is on the side of the electrostatic chuck section, is covered with a sheet or film of insulating material, and the electrostatic chuck section bonded with the heating member and the temperature adjusting base section covered with the insulating material are bonded and integrated via an insulating organic adhesive layer formed by curing a liquid adhesive. | ||
| 申请公布号 | US9343346(B2) | 申请公布日期 | 2016.05.17 |
| 申请号 | US201113575545 | 申请日期 | 2011.01.28 |
| 申请人 | Sumitomo Osaka Cement Co., Ltd. | 发明人 | Kosakai Mamoru;Ishimura Kazunori;Satou Takashi;Hayahara Ryuuji;Watanabe Takeshi;Moriya Yoshiaki;Furuuchi Kei |
| 分类号 | H05B3/68;H01L21/683;H01L21/67 | 主分类号 | H05B3/68 |
| 代理机构 | Wood, Herron & Evans, LLP | 代理人 | Wood, Herron & Evans, LLP |
| 主权项 | 1. An electrostatic chuck apparatus including: an electrostatic chuck section having one main surface that is a mounting surface on which a plate specimen is mounted, and being equipped with an electrostatic adsorbing internal electrode; and a temperature adjusting base section that adjusts the electrostatic chuck section to a desired temperature, wherein a heating member is bonded to a main surface of the electrostatic chuck section, which is opposite to the mounting surface, via an adhesive material, the heating member and the adhesive material having a predetermined pattern of the same shape, the whole or a part of the main surface of the temperature adjusting base section, which is on the side of the electrostatic chuck section, is covered with a sheet or film of insulating material made of a resin having insulating properties and voltage endurance, and the electrostatic chuck section bonded with the heating member and the temperature adjusting base section covered with the sheet or film of insulating material are bonded and integrated via an insulating organic adhesive layer formed by curing a liquid adhesive. | ||
| 地址 | Tokyo JP | ||