发明名称 |
Cross technology reticle (CTR) or multi-layer reticle (MLR) CDU, registration, and overlay techniques |
摘要 |
Methods for reducing reticle transmission differences and for optimizing layer placement for overlay in MTRs and CTRs are disclosed. Embodiments include providing a reticle having a prime area and a frame area surrounding the prime area; determining RT differences across the prime area; and providing RT adjustment structures on the reticle to decrease the RT differences. Other embodiments include grouping multiple layers of a semiconductor production flow, the layers for each group having an RT difference less than a predetermined value; and placing the layers on plural ordered reticles of a reticle set, each reticle having multiple image fields, by selecting, for each reticle, layers from a single group and optimizing placement of the layers for overlay. Other embodiments include selectively rotating image fields on a reticle having multiple image fields to improve overlay, or optimizing placement of DDLs on CTRs by placing each design orientation on a different reticle. |
申请公布号 |
US9341961(B2) |
申请公布日期 |
2016.05.17 |
申请号 |
US201313839894 |
申请日期 |
2013.03.15 |
申请人 |
GLOBALFOUNDRIES SINGAPORE PTE. LTD. |
发明人 |
Ning Guo Xiang;Hotzel Arthur;Ackmann Paul;Tan Soon Yoeng |
分类号 |
G03B27/32;G03B27/54;G03F1/00;G06F17/50;G03F7/20;G03F1/70;G03F1/38;G03F1/50 |
主分类号 |
G03B27/32 |
代理机构 |
Ditthavong & Steiner, P.C. |
代理人 |
Ditthavong & Steiner, P.C. |
主权项 |
1. A method comprising:
providing a transmissive or reflective reticle having a frame area and a prime area, the frame area surrounding the prime area; determining differences in RT (reticle transmission or reflection for a transmissive or reflective reticle, respectively) across the prime area; and providing disposable RT adjustment structures in the prime area in dummy filled regions on the reticle to decrease or increase the RT differences, wherein the reticle comprises a multilayer reticle (MLR), wherein determining RT differences comprises determining RT differences between different layers of the MLR, and wherein the RT is adjusted subsequent to a determination of an average RT tuning of respective layers of the MLR. |
地址 |
Singapore SG |