Device and method for micro-electro-mechanical-system photonic switch

摘要

In one embodiment, micro-electro-mechanical-system (MEMS) mirror structure includes an electrode plate including a first deflection electrode and a second deflection electrode, where the second deflection electrode is opposite the first deflection electrode, where the first deflection electrode is configured to receive a first drive voltage, and where the second deflection electrode is configured to receive a second drive voltage. The MEMS mirror structure also includes a mirror support pillar disposed on the electrode plate, where the mirror support pillar has a bearing surface and a mirror disposed above the bearing surface of the support pillar, where the mirror has a deflection angle, and where the first voltage is nonzero when the deflection angle is zero.

主权项

1. A micro-electro-mechanical-system (MEMS) mirror structure comprising:
an electrode plate comprising a first deflection electrode and a second deflection electrode, wherein the second deflection electrode is opposite the first deflection electrode, wherein the first deflection electrode is configured to receive a first drive voltage, and wherein the second deflection electrode is configured to receive a second drive voltage; a mirror support pillar disposed on the electrode plate, wherein the mirror support pillar has a bearing surface; and a mirror disposed above the bearing surface of the mirror support pillar, wherein the mirror has a deflection angle, and wherein the first drive voltage is nonzero when the deflection angle is zero.