Vibrator element, method of manufacturing vibrator element, angular velocity sensor, electronic device, and moving body

摘要

A vibrator element including: a base portion; vibrating arms which extend from the base portion; a first drive section and a second drive section, and a first detecting section and a second detecting sensor which are respectively provided in the vibrating arms; adjusting arms which extend from the base portion in parallel to the vibrating arms; and a first adjusting section and a second adjusting section which are respectively provided on a principal surface of the adjusting arms, wherein, in the first adjusting section and the second adjusting section, a first electrode, piezoelectric layers, and adjustment electrodes are laminated on the first principal surface to be formed, and output signals of the first adjusting section and the second adjusting section are in antiphase to charges generated by the first detecting section and the second detecting section when no angular velocity is added to the vibrating arms.

主权项

1. A vibrator element comprising:
a base portion; a vibrating arm which extends from the base portion; a drive section and a detecting section provided in the vibrating arm; an adjusting arm which extends from the base portion along an extension direction of the vibrating arm; and an adjusting section which is provided above a principal surface of the adjusting arm, wherein the adjusting section has a first electrode, a second electrode, and a piezoelectric layer provided between the first and second electrodes, and an output signal of the adjusting arm is in antiphase to a charge output from the detecting section when no angular velocity is added to the vibrating arm.