| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device that can make deformation of a piezoelectric element more efficient while securing reliability on the piezoelectric element, a liquid spray head, and a liquid spray device.SOLUTION: The piezoelectric device includes: a deformation part allowed to deform an elastic layer 17; a non-deformation part hindered from deforming of the elastic layer 17; and a piezoelectric element 19 having a lower electrode layer 27, a piezoelectric layer 28 and an upper 29 sequentially laminated therein. The deformation part has an area P1 in which the piezoelectric element 19 is arranged, an area P3 adjacent to the non-deformation part, and an area P2 arranged between the area P1 and the area P3. In the area P1, the elastic layer 17, an insulator layer 18, the lower electrode layer 27, the piezoelectric layer 28 and the upper electrode layer 29 are laminated sequentially. In the area P2, the elastic layer 17, the insulator layer 18, the piezoelectric layer 28 and the upper electrode layer 29 are laminated sequentially. In the area P3, the elastic layer 17 and the upper electrode layer 29 are laminated sequentially, where the elastic layer 17 is made of silicon oxide, and to the silicon oxide in the area P3, impurities are added at the upper electrode layer 29 side.SELECTED DRAWING: Figure 6 |
