MANUFACTURING METHOD OF THIN FILM METAL RESISTANCE

摘要

PROBLEM TO BE SOLVED: To provide a method capable of manufacturing a plurality of thin film metal resistances having values of resistance per unit length different from each other while suppressing an increase in the number of manufacturing processes.SOLUTION: A method includes the steps of: forming a resist pattern 41 having a first opening 42 for forming a first thin film metal resistor and a second opening 43 for forming a second thin film metal resistor on an insulation film 51; depositing a metal material for a thin film metal resistance within the first opening 42 and the second opening 43 on the resist pattern 41; and removing the metal material on the resist pattern 41 by removing the resist pattern 41. The width W5 of a first part 42a of the first opening 42 for forming a first resistance part of the first thin film metal resistor is made narrower than the width W6 of a first part 43a of the second opening 43 for forming a second resistance part of the second thin film metal resistor.SELECTED DRAWING: Figure 5