LIGHT DEFLECTOR, TWO-DIMENSIONAL IMAGE DISPLAY DEVICE, OPTICAL SCANNER, AND IMAGE FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an optical deflector which can contribute to the improvement of image quality by suppressing the fluctuations of a scanning line.SOLUTION: An optical deflector 2 includes a mirror part 4 which has a light reflection surface, a flat plate-like movable frame 6 which includes the mirror part 4, a support frame 8, and a first meandering beam part 10 and a second meandering beam part 12 which are arranged between the movable frame 6 and the support frame 8 on both sides of the movable part 6. One end 10a of the first meandering beam part 10 is fixed to the support frame 8 and the other end 10b is fixed to the movable frame 6. A fixation part between the other end 10b of the first meandering beam part 10 and the movable frame 6 is configured as a connection part C1. One end 12a of the second meandering beam part 12 is fixed to the support frame 8 and the other end 12b is fixed to the movable frame 6. A fixation part between the other end 12b of the second meandering beam part 12 and the movable frame 6 is configured as a connection part C2. A vibration suppression part is integrally formed on the rear surface sides of the connection parts C1 and C2. Thus, a processing error in a process for manufacturing the optical deflector and the variation of the driving force of a piezoelectric member are suppressed.SELECTED DRAWING: Figure 1