FOREIGN MATTER REMOVAL METHOD, FOREIGN MATTER REMOVAL DEVICE, AND PROBE

摘要

PROBLEM TO BE SOLVED: To provide a foreign matter removal method capable of accurately removing foreign matter existing on a surface of an object without requiring an additional process such as washing.SOLUTION: In a method for removing foreign matter existing on a surface of an object using an atomic force microscope, a probe 1 is used which has a first carbon nanotube 12 and a second carbon nanotubes 13 shorter than the first carbon nanotube 12. In detecting foreign matter, scanning is performed in a state where a tip end of the first carbon nanotube 12 faces the surface of the object. In removing foreign matter, the first carbon nanotube 12 is bent to make the foreign matter adhere to the second carbon nanotubes 13.SELECTED DRAWING: Figure 1