| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact probe having a structure that prevents stress concentration and can withstand repeated measurements.SOLUTION: An elastic insulator layer 20 is disposed on one surface of a hard substrate 10. The insulator layer 20 includes a first hole 21 in the center. Each wire 30 is disposed partially in the insulator layer 20, the tip side thereof projects to the first hole 21 of the insulator layer 20, and the tip side includes a projection 31 serving as a contact with an electrode of an inspecting object. Each wire 30 has a cantilever structure in which a conductive connection part 22 serves as the fulcrum of the vertical displacement. Following the vertical displacement of the wires 30, the elastic insulator layer 20 is elastically deformed and compressed by the wires 30.SELECTED DRAWING: Figure 1 |
