| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer device capable of eliminating concurrence of a phase error due to the vibration of a fiber.SOLUTION: An interferometer device includes: a reference bulk optical system 1f comprising a photo coupler 1b for dividing light into a reference optical path and a measurement optical path, a collimator lens 1g for converting the light guided to a light guiding fiber 1c of the reference optical path into a parallel light flux as reference light, and a reference mirror 1h for reflecting the reference light; a measurement bulk optical system 1n including a collimator lens 1p for converting light guided to a light guiding fiber 1d of the light measurement optical path into a parallel light flux as measurement light and monitor light, a measurement object 1s for reflecting the measurement light, and monitor mirror 1r for reflecting the monitor light; a light guiding fiber 1t for guiding a return light from the measurement bulk optical system 1n; a light guiding fiber 1j for guiding a return light from the reference bulk optical system 1f; and a photo coupler 1k for synthesizing the return light from both light guiding fibers. The measurement bulk optical system 1n is provided with a beam splitter 1q for splitting and synthesizing the measurement light and the monitor light.SELECTED DRAWING: Figure 1 |
