发明名称 DROPLET DISCHARGE DEVICE, DROPLET DISCHARGE METHOD, PROGRAM, AND COMPUTER STORAGE MEDIUM
摘要 PROBLEM TO BE SOLVED: To reduce the occupied area of a droplet discharge device and concurrently improve the processing efficiency in the droplet discharge device.SOLUTION: A droplet discharge device 1 has: a droplet discharge head 24; a work stage 40; a flushing unit 50; a discharge inspection unit 60; a discharge inspection camera 31, and a drawing inspection camera 32. The work stage 40, the flushing unit 50, and the discharge inspection unit 60 are disposed in a main scanning direction in a written order. The discharge inspection camera 31 and the drawing inspection camera 32 are disposed in the main scanning direction sandwiching the droplet discharge head 24. The discharge inspection camera 31 is disposed at the flushing unit 50 side and the drawing inspection camera 32 is disposed at the work stage 40 side.SELECTED DRAWING: Figure 1
申请公布号 JP2016077966(A) 申请公布日期 2016.05.16
申请号 JP20140212043 申请日期 2014.10.16
申请人 TOKYO ELECTRON LTD 发明人 MIYAZAKI KAZUHITO;MINE YOSUKE;MIYAZAKI FUMIHIRO
分类号 B05C11/00;B05C5/00;B05C11/10;B05D1/26;H01L51/50;H05B33/10 主分类号 B05C11/00
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