HOME PORT, APPARATUS FOR TREATING SUBSTRATE INCLUDING THIS AND METHOD FOR REMOVING STATIC ELECTRICITY

摘要

The present invention relates to a substrate treating apparatus. The substrate treating apparatus according to an embodiment of the present invention includes a housing, a substrate support unit, a solution supply unit having a nozzle for injecting a process solution, and a home port in which the nozzle stands by. The home port includes a body having an injection space and a solution injection unit. The solution injection unit sprays a static electricity removing solution including a surfactant to the nozzle which stands by in the home port, and then removes the static electricity from the nozzle by spraying a static electricity removing solution including thinner. So, the static electricity of the nozzle can be removed.