| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface plate carrying carriage capable of narrowing a width of a passage for carrying a surface plate, by narrowing a width when carrying the surface plate.SOLUTION: A surface plate 2 removed from a polishing device or a surface plate carrying carriage 1 for carrying the surface plate 2 to be installed in the polishing device, comprises a surface plate holding part 3 for holding the surface plate 2, a support base 4 for supporting the surface plate holding part 3 from the lower side, a lifting mechanism 5 for lifting the surface plate holding part 3 and an inclining mechanism 8 for inclining the surface plate holding part 3 of holding the surface plate 2, and the surface plate 2 can be carried in a state of inclining the surface plate holding part 3 holding the surface plate 2 by the inclining mechanism 8.SELECTED DRAWING: Figure 1 |
