PIEZOELECTRIC ELEMENT, METHOD OF MANUFACTURING THE SAME, AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of achieving an improvement in piezoelectric characteristics and securing high reliability.SOLUTION: In a piezoelectric element 300, a first electrode 60, a piezoelectric layer 70 comprising a composite oxide of an ABOtype perovskite structure containing Mg, and a second electrode 80 are laminated from a substrate 10 side. The first electrode 60 includes a diffusion suppression layer 60a which suppresses diffusion of Mg and a diffusion layer 60b which diffuses Mg as compared with the diffusion suppression layer 60a. The diffusion suppression layer 60a is provided closer to the substrate 10 side than the diffusion layer 60b.SELECTED DRAWING: Figure 4