OPTICAL INTERCONNECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a photodetector part capable of acquiring high photoelectric conversion efficiency in an optical interconnection device having an optical waveguide part and the photodetector part on the same substrate.SOLUTION: An optical interconnection device 1 includes: a semiconductor substrate 10 an optical waveguide part 2 formed on the semiconductor substrate 10; and a photodetector part 3 formed on one end part of the optical waveguide part 2. The photodetector part 3 includes a bipolar transistor 30 that amplifies an optical signal S transmitted through the optical waveguide part 2 to perform photoelectric conversion. In the bipolar transistor 30, a base layer 31 is formed in the optical waveguide part 2, and a pn junction part 30j formed of the base layer 31 and a collector layer 32 is extended along the transmission direction of the optical signal S.SELECTED DRAWING: Figure 1