SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME, AND MODULE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a transistor having stable electric characteristics, or to provide a transistor having normally-off electric characteristics.SOLUTION: A semiconductor device comprises a conductor, a semiconductor, a first insulator, and a second insulator. The semiconductor is arranged on the first insulator. The conductor is arranged on the semiconductor. The second insulator is arranged between the conductor and the semiconductor. The first insulator contains fluorine and hydrogen. A fluorine concentration of the first insulator is higher than a hydrogen concentration thereof.SELECTED DRAWING: Figure 1