| 摘要 |
PROBLEM TO BE SOLVED: To allow an inspection of a cone-shaped mirror plane having an aperture formed in a bottom part to be more facilitated.SOLUTION: A surface inspection device 10 comprises: a stripe member 12; a photographing device 14; and a computation unit 18. The stripe member 12 is shaped into a cylinder or column, and is arranged in a bottom aperture 25 so that a central axis of the stripe member runs along a height direction of a cone-shaped mirror plane 24, and has a vertical stripe pattern 26 along a center axis direction arrayed on an outer peripheral face in a peripheral direction. The photographing device 14 is arranged so as to be spaced with respect to the stripe member 12 toward the height direction of the cone-shaped mirror plane 24, and photographs the cone-shaped mirror plane 24 having the vertical stripe pattern 26 reflected. The computation unit 18 detects presence or absence of flaws on the cone-shaped mirror plane 24 on the basis of the photographing image of the cone-shaped mirror plane 24.SELECTED DRAWING: Figure 1 |
