| 摘要 |
PROBLEM TO BE SOLVED: To suppress particles soaring when bending a housing forming a vacuum atmosphere.SOLUTION: A housing 101 includes an exhaust hole 111 for forming vacuum atmosphere, a suction hole 112 for introducing gas, and holding means for holding a substrate 200, and a vacuum processing system includes a fine particle detector 102 having a detection tool 121 arranged between the suction hole 112 and the peripheral edge of the substrate 200 thus held, in a route through which the gas is spread when introduced from the suction hole 112.SELECTED DRAWING: Figure 1 |
