发明名称 SEPARATION DEVICE AND SEPARATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a separation device and a separation method, capable of preventing a position of each flake body from being shifted from a theoretical position as much as possible when the interval between a plurality of flake bodies formed from a plate-like member is mutually extended.SOLUTION: A separation device 10 includes cutting means 110 in which first through fourth direction sides of an adhesive sheet AS is supported with first through fourth support means 20, 40, 60, (80), first through fourth tensile force application means 30, 50, 70, (90) are provided applying the tensile force in the first through fourth directions to the adhesive sheet AS by moving the first through fourth support means 20, 40, 60, (80) to the first through fourth directions, and non-interference notches are formed preventing the tensile force from being applied to a surrounded area in the synthetic direction of the tensile force in four directions by being extended from each apex part of a polygon-shaped surrounded area surrounding an adherend stuck area where a plate-like member WF of the adhesive sheet AS is stuck to the outer edge direction of the adhesive sheet AS, respectively, thereby capable of forming the adhesive sheet for separation.SELECTED DRAWING: Figure 1
申请公布号 JP2016081974(A) 申请公布日期 2016.05.16
申请号 JP20140209408 申请日期 2014.10.10
申请人 LINTEC CORP 发明人 SUGISHITA YOSHIAKI
分类号 H01L21/301;H01L21/683 主分类号 H01L21/301
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