| 摘要 |
PROBLEM TO BE SOLVED: To secure a stable operation in which oscillation or the like in an unnecessary mode is eliminated, by adjusting a cathode position after assembly even in the case where a position of a cathode at the time of assembly is changed or a use condition is different.SOLUTION: In a magnetron, a cathode 2 that is disposed in a central part of an anode 1 is supported by a cathode support 7 and a cylinder of the cathode support 7 is connected to a side face opening 1H of the anode 1. As a cylindrical main body of the cathode support 7, a connection support part 8 made of e.g., copper having plasticity and a flange (position adjustment part) 9 made of kovar having plasticity lower than that of the connection support part 8 are provided. The cathode support 7 is moved by the flange 9, such that a position of the cathode 2 relative to the anode 1 is adjusted. Further, a screw mechanism for cathode position adjustment may also be provided in an outer circumference of the flange 9.SELECTED DRAWING: Figure 1 |
