| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage attitude adjusting device, easy in thinning a thickness, and smooth in feeding.SOLUTION: Thinning of a stage attitude adjusting device 1 is attained by juxtaposing guide means 4 composed of a circular arc-shaped key groove 11 of an inside guide member 7, a circular arc-shaped key groove 12 of an outside guide member 9 and a circular arc-shaped key groove 13 for allowing sliding between the key groove 12 and itself by being immovably pressed in the key groove 11, in the direction of a normal of a plane including a circular arc locus R, by sandwiching an arrangement position of a feed mechanism 5 composed of a screw 14 and a nut 15, and dislocation is reduced along the normal direction of the circular arc locus R generated between a position of a sliding contact surface for making frictional force act for checking the movement of a movable stage 2 and a position of the nut 15 of adding force for moving the movable stage 2, and a feed of the movable stage 2 is smoothed by reducing uselessness of feeding force consumed by the bending moment with this dislocation as the arm length.SELECTED DRAWING: Figure 5 |
