| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for readily providing masking with an exact boundary line.SOLUTION: The masking method includes: setting an elastic jig at a processing surface not to be subjected to masking in an inner wall surface of a substrate; enlarge the elastic jig in a processing direction of the substrate; and providing resist processing to the substrate while pressing the elastic jig onto the processing surface.SELECTED DRAWING: Figure 3 |
