| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface emitting semiconductor laser element and a surface emitting semiconductor laser element manufacturing method, which inhibit a complicated manufacturing process when compared to the case of providing an antioxidant structure on a lateral face of a surface emitting semiconductor laser element.SOLUTION: A surface emitting semiconductor laser element (10) comprises: a substrate (12); a semiconductor layer including a first conductivity type first semiconductor multilayer film (16) formed on the substrate (12), an active region (24) and a second conductivity type second semiconductor multilayer film (26) which constitutes a resonator with the first semiconductor multilayer (16); and an antioxidant structure (60) including a trench (T2) formed along at least a part of an outer periphery of the semiconductor layer and an antioxidant part (34) formed on a surface of the trench (T2).SELECTED DRAWING: Figure 1 |
