发明名称 PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS AND MOVABLE BODY
摘要 PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of improving pressure detection accuracy, and further to provide an electronic apparatus provided with the physical quantity sensor and a movable body.SOLUTION: A pressure sensor unit 2 comprises: a recess portion 41 having a diaphragm 10 on a bottom portion; and a gelatinous or liquid pressure propagation member 5 being filled in the recess portion 41 and covering the diaphragm 10. An opening portion of the recess portion 41 has a first connection surface 41b connecting the other surface 40b and a wall surface 41a of the recess portion 41 in at least a part thereof. The first connection surface 41b has an angle against a pressure receiving surface 10a of the diaphragm 10 is less than that of the wall surface 41a.SELECTED DRAWING: Figure 1
申请公布号 JP2016080491(A) 申请公布日期 2016.05.16
申请号 JP20140211450 申请日期 2014.10.16
申请人 SEIKO EPSON CORP 发明人 YOTSUYA SHINICHI
分类号 G01L9/00;G01L19/06;H01L29/84 主分类号 G01L9/00
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