| 摘要 |
PROBLEM TO BE SOLVED: To provide a light deflection mirror, an optical deflection device, an optical scanning device, and an image projection device capable of performing uniform optical scanning by highly accurately detecting the change of the oscillation state of the optical deflection mirror due to structural variation or the physical property change of a piezo-electric material.SOLUTION: An optical deflection mirror 100 configured to deform each beam part 108a, 108b, 110a and 110b by applying a drive voltage to a plurality of piezo-electric members for driving, and to rotationally drive a mirror 103 in accordance with the accumulation of the deformation includes: a plurality of piezo-electric members for detection disposed in parallel with the piezo-electric members for driving at each beam part, which deform together with each beam part; a plurality of electrode groups for driving for individually applying the drive voltage to the piezo-electric members for driving at each beam part; and a plurality of electrode groups for detection for individually detecting a detection voltage from each piezo-electric member for detection corresponding to the deformation of each beam part.SELECTED DRAWING: Figure 1 |
