| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect a conversion error at the time of conversion of drawing data in a vector format generated from design data into drawing data in a pixel format in accordance with an internal format of a multi charged particle beam lithography apparatus.SOLUTION: A drawing data verification method according to one aspect of the present invention verifies a conversion error accompanying data conversion from first drawing data D1 in a vector format, which is based on design data D0, to second drawing data D2 in a pixel format by converting the second drawing data D2 into third drawing data D3 in a vector format, performing an exclusive OR operation on the first drawing data D1 and the third drawing data D3, enlarging a diagram 140 of the first drawing data D1, creating an allowable error region diagram 144 from a difference between an enlarged diagram 142 and the diagram 140 of the first drawing data D1, and detecting a defect 122 through mask processing with the allowable error region diagram 144 on a diagram 120 generated by the exclusive OR operation.SELECTED DRAWING: Figure 2 |
