| 摘要 |
PROBLEM TO BE SOLVED: To suppress a temperature rise in an inspection device inspecting a work-piece having a stepped portion.SOLUTION: An inspection device 20 inspecting a work-piece 100 having a stepped portion comprises: a pair of electrode plates 220 and 230 interposing the work-piece 100 therebetween and applying a voltage to the work-piece 100; and a heat transfer member 240 disposed so as not to generate a gap between the stepped portion and one electrode plate 220 out of the pair of electrode plate 220 and 230.SELECTED DRAWING: Figure 2 |
