| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for manufacturing nano order structures, capable of expanding the type of a material applicable to the nano order structures and manufacturing the nano order structures at a fine size, and a substrate structure having nano order structures of a material having an industrially widely applicable range.SOLUTION: A method for forming a plurality of nano order structures on the flat surface of a substrate includes the first step of vapor-depositing a main material of the nano order structures on the flat surface of a substrate. In the first step, an absolute temperature of the substrate is 0.25 or less times of the melting point (an absolute temperature) of the main material of the nano order structures. Thereby, fine nano order structures having a desired shape can be formed by a desired material.SELECTED DRAWING: Figure 1 |
