| 摘要 |
PROBLEM TO BE SOLVED: To determine the presence of a defect in a test object in-line and obtain information on the test object that is found to have a defect.SOLUTION: The present invention is an inspection device 100 for inspecting a plurality of test objects, said device having: a first measurement unit 101 for measuring a terahertz wave having passed through each of a plurality of test objects 108 or reflected at each of the plurality of test objects; a determination unit 103 for determining whether or not a prescribed condition is satisfied using the measurement result of the first measurement unit; a separation unit 104 for separating the plurality of test objects between those that satisfy the prescribed condition and those that do not satisfy the prescribed condition on the basis of the determination result of the determination unit; and a second measurement unit 102 for measuring the time waveform of a terahertz wave pulse having passed through the test object not satisfying the prescribed condition and separated by the separation unit or reflected by the test object not satisfying the prescribed condition.SELECTED DRAWING: Figure 1 |
