SUBSTRATE TREATING APPARATUS AND SUPPORTING UNIT MANUFACTURING METHOD

摘要

Provided is a substrate treating apparatus capable of stably supplying electric power. The substrate treating apparatus according an embodiment of the present invention comprises: a housing providing a treatment space therein; and a supporting unit supporting and heating a substrate in the treatment space. The supporting unit includes: a supporting plate supporting the substrate; a heating element provided in the supporting plate; a terminal unit connected with an electric line applying electric power to the heating element; and a wiring unit connecting the heating element with the terminal unit. The heating element and the terminal unit are separated, and the wiring unit may connect the heating element unit with the terminal unit.