| 摘要 |
The purpose of the present invention is to enable a doping heater for a solar cell wafer to be assembled in an optimal condition to facilitate assembling and to prevent a quartz process tube from sagging at high temperatures. The present invention relates to a doping heater for a solar cell wafer, wherein a process tube for doping heat treatment on a solar cell wafer is advanced into the heater and the heater envelops and heats the process tube. The doping heater for a solar cell wafer comprises: a heating wire having a spiral coil wound inside a housing to generate heat inside the heater; a heating wire support for combining the heating wire with the heater housing while inserting and aligning the heating wire to fixate the heating wire to the inner wall of the housing; and a heating wire sagging preventing unit installed on the heating wire and the inner wall of the heater to prevent the heating wire, which is exposed to high temperatures during a process, from sagging. |
