发明名称 APPARATUS AND METHOD FOR CUTTING SEMI/NON-CONDUCTOR USING WEDM
摘要 A wire electrical discharge machining (WEDM) method is disclosed. The WEDM method comprises the following steps of: (a) providing one of a non-conductive object and a weakly conductive object having a cutting target surface; (b) providing one of a wire and a cutting tool having a cutting blade edge to cut the one object along the cutting target surface; (c) providing a conductive medium to adhere to the cutting target surface via the cutting blade edge; and (d) applying a current between the one of the wire and the cutting tool and the cutting target surface adhered to the conductive medium to melt the cutting target surface.
申请公布号 KR20160053825(A) 申请公布日期 2016.05.13
申请号 KR20150154713 申请日期 2015.11.04
申请人 NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY 发明人 KUO CHUN LIANG;JENG JENG YWAN
分类号 H01L21/78;H01L23/00 主分类号 H01L21/78
代理机构 代理人
主权项
地址