发明名称 |
APPARATUS AND METHOD FOR CUTTING SEMI/NON-CONDUCTOR USING WEDM |
摘要 |
A wire electrical discharge machining (WEDM) method is disclosed. The WEDM method comprises the following steps of: (a) providing one of a non-conductive object and a weakly conductive object having a cutting target surface; (b) providing one of a wire and a cutting tool having a cutting blade edge to cut the one object along the cutting target surface; (c) providing a conductive medium to adhere to the cutting target surface via the cutting blade edge; and (d) applying a current between the one of the wire and the cutting tool and the cutting target surface adhered to the conductive medium to melt the cutting target surface. |
申请公布号 |
KR20160053825(A) |
申请公布日期 |
2016.05.13 |
申请号 |
KR20150154713 |
申请日期 |
2015.11.04 |
申请人 |
NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY |
发明人 |
KUO CHUN LIANG;JENG JENG YWAN |
分类号 |
H01L21/78;H01L23/00 |
主分类号 |
H01L21/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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