| 摘要 |
Disclosed is a wafer protection apparatus comprising a storage unit and a protection unit. The storage unit stores a wafer. The protection unit allows an air curtain including nitrogen to be formed at the entrance of the storage unit to separate the interior and exterior of the storage unit, thereby protecting the interior of the storage unit. According to the present invention, a wafer storage environment of the interior of the storage unit is maintained, thereby improving the quality of manufacturing a wafer. |
