| 摘要 |
Provided are a coating solution pump unit and a coating device which can suppress a horizontal step even though a thin film is formed on a substrate. The coating solution pump unit provides a coating solution to a coating unit of the coating device configured to form a coating film on the substrate by relatively moving the substrate and the coating unit. In the coating solution pump unit, a pump body, a ball screw driving unit, and a motor unit are sequentially arranged on a first axis wherein the pump body supplies a coating solution, the ball screw driving unit transfers driving force to the pump body, and the motor unit generates driving force, and a planetary roller reducer is installed between the motor unit and the ball screw driving unit. |
