发明名称 |
ELECTRON BEAM GUN HAVING STRUCTURE FOR ANTI-LEAK OF COOLING MEDIUM |
摘要 |
The present application relates to an electron beam emission device having a leakage prevention structure, which is capable of preventing a coolant from falling onto a workpiece even when the coolant of the electron beam emission device leaks out. According to an embodiment of the present application, the electron beam emission device having a coolant leakage prevention structure comprises: a housing which defines a space in which an electron beam is accelerated; a cathode which is disposed on one side in the housing and emits electrons; an anode which is spaced apart from the cathode toward the other side in the housing and accelerates the electrons emitted from the cathode; a cooling plate which includes an emission port formed at a center thereof and a coolant path formed thereinside, the emission port being configured to emit the electrons accelerated by the anode to the outside of the housing; and a water barrier part which is spaced apart from an inner surface of the housing, extends toward the cathode from a circumference of the emission port in the cooling plate, and is watertight from the cooling plate. |
申请公布号 |
KR20160053187(A) |
申请公布日期 |
2016.05.13 |
申请号 |
KR20140150268 |
申请日期 |
2014.10.31 |
申请人 |
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY |
发明人 |
KANG, EUN GOO;LEE, SEOK WOO;CHOI, HON JONG |
分类号 |
H01J29/02;H01J29/04;H01J29/90;H01J37/06 |
主分类号 |
H01J29/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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