发明名称 ELECTRON BEAM GUN HAVING STRUCTURE FOR ANTI-LEAK OF COOLING MEDIUM
摘要 The present application relates to an electron beam emission device having a leakage prevention structure, which is capable of preventing a coolant from falling onto a workpiece even when the coolant of the electron beam emission device leaks out. According to an embodiment of the present application, the electron beam emission device having a coolant leakage prevention structure comprises: a housing which defines a space in which an electron beam is accelerated; a cathode which is disposed on one side in the housing and emits electrons; an anode which is spaced apart from the cathode toward the other side in the housing and accelerates the electrons emitted from the cathode; a cooling plate which includes an emission port formed at a center thereof and a coolant path formed thereinside, the emission port being configured to emit the electrons accelerated by the anode to the outside of the housing; and a water barrier part which is spaced apart from an inner surface of the housing, extends toward the cathode from a circumference of the emission port in the cooling plate, and is watertight from the cooling plate.
申请公布号 KR20160053187(A) 申请公布日期 2016.05.13
申请号 KR20140150268 申请日期 2014.10.31
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 KANG, EUN GOO;LEE, SEOK WOO;CHOI, HON JONG
分类号 H01J29/02;H01J29/04;H01J29/90;H01J37/06 主分类号 H01J29/02
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