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发明名称
PLASMA DEVICE
摘要
본 발명의 플라즈마 장치는 플라즈마 가공되는 가공물이 수용되는 챔버 및 상기 챔버의 일측에 마련되는 안테나 코일을 포함하고, 상기 안테나 코일은 부채꼴 형태로 형성되며, 상기 안테나 코일에서 원호 부위는 지그재그 형태로 구부러질 수 있다.
申请公布号
KR101620993(B1)
申请公布日期
2016.05.13
申请号
KR20140116463
申请日期
2014.09.02
申请人
(주)얼라이드 테크 파인더즈;서기원
发明人
서기원
分类号
H01L21/02;H01L21/205;H01L21/3065;H05H1/46
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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