METHOD OF COINCIDENCE IMAGING USING SECONDARY ELECTRONS AND A DEVICE FOR EXECUTING THIS METHOD

摘要

The invention relates to a method of coincidence imaging using secondary electrons (1). Part of the invention is also a device (9) for executing this method. During the passage of primary radiation (5) through a conductive planar electrode (2), secondary electrons (1) are emitted. The impact of the secondary electrons (1) onto the detector (4) is recorded. To avoid the results of the detection from being distorted by random secondary electrons (1), e.g. from thermal emission, only the coincidence groups of secondary electrons (1) that carry sufficient energy (E) to overcome the detection threshold (6) are registered.