| 发明名称 |
WAFER TRANSFER ROBOT, METHOD OF CONTROLLING THE SAME, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME |
| 摘要 |
A wafer transfer robot includes a robot transfer mechanism including a robot axis member and a robot arm member connected to the robot axis member, a robot hand connected to the robot arm member of the robot transfer mechanism and configured to transfer a wafer by using the robot transfer mechanism, a vertical displacement sensor installed in an upper side of the robot hand, and a plurality of horizontal displacement sensors installed in the upper side of the robot hand and separate from each other along a virtual line that is perpendicular to bilaterally symmetric axis of the robot hand. |
| 申请公布号 |
US2016133502(A1) |
申请公布日期 |
2016.05.12 |
| 申请号 |
US201514870242 |
申请日期 |
2015.09.30 |
| 申请人 |
Won Jung-min;Jung Myoung-ho;Moon Byung-soo;Yun Sung-kyung;Lee Woo-kyu |
发明人 |
Won Jung-min;Jung Myoung-ho;Moon Byung-soo;Yun Sung-kyung;Lee Woo-kyu |
| 分类号 |
H01L21/687;H01L21/68;B25J9/16;G01D5/34;B25J9/04;B25J11/00 |
主分类号 |
H01L21/687 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A wafer transfer robot comprising:
a robot transfer mechanism comprising a robot axis member and a robot arm member connected to the robot axis member; a robot hand connected to the robot arm member of the robot transfer mechanism and for transferring a wafer by using the robot transfer mechanism; a vertical displacement sensor installed in an upper side of the robot hand; and a plurality of horizontal displacement sensors installed in the upper side of the robot hand and separate from each other along a virtual line that is perpendicular to a bilaterally symmetric axis of the robot hand. |
| 地址 |
Suwon-si KR |
