| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel method of manufacturing a solar cell structure which allows for enhancement of the efficiency of a solar cell.SOLUTION: A method of manufacturing a solar cell structure includes a step 102 for forming a tunnel oxide layer on the surface of a substrate in a furnace, a step 104 for forming an amorphous layer on the tunnel oxide layer, without taking out of the furnace, a step 106 for providing a first region containing an N type dopant, and a second region containing a P type dopant, by doping the amorphous layer, and a step 108 where a polycrystal layer having an N type dope region and a P type dope region is formed by heating the amorphous layer.SELECTED DRAWING: Figure 1 |
