| 发明名称 |
METHOD AND APPARATUS FOR CALIBRATING PRESSURE SENSOR INTEGRATED CIRCUIT DEVICES |
| 摘要 |
In an embodiment, a method for calibrating a pressure sensor device is disclosed. The method involves determining the resonant frequency of a membrane of the pressure sensor device after the pressure sensor device has been attached to a circuit board, calculating a change in the resonant frequency from a resonant frequency stored in memory, calculating strain of the membrane of the pressure sensor device from the change in resonant frequency, and calibrating the pressure sensor device based on a capacitance-to-pressure curve calculated using the strain of the membrane of the pressure sensor device. |
| 申请公布号 |
US2016131550(A1) |
申请公布日期 |
2016.05.12 |
| 申请号 |
US201414538397 |
申请日期 |
2014.11.11 |
| 申请人 |
ams International AG |
发明人 |
Besling Willem Frederik Adrianus;van der Avoort Casper;Pijnenburg Remco Henricus Wilhelmus;Goossens Martijn |
| 分类号 |
G01L27/00;G01L9/12 |
主分类号 |
G01L27/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for calibrating a pressure sensor device, the method comprising:
determining the resonant frequency of a membrane of the pressure sensor device after the pressure sensor device has been attached to a circuit board; calculating a change in resonant frequency between the determined resonant frequency and a resonant frequency stored in memory; calculating strain of the membrane of the pressure sensor device from the change in resonant frequency; and calibrating the pressure sensor device based on a capacitance-to-pressure dependency calculated using the strain of the membrane of the pressure sensor device. |
| 地址 |
Rapperswil-Jona CH |
