发明名称 MEASUREMENT OBJECT, METHOD FOR THE PRODUCTION THEREOF AND DEVICE FOR THE THERMAL TREATMENT OF SUBSTRATES
摘要 A measuring object for use in a heating apparatus for the thermal treatment of substrates is described, wherein the measuring object is the substrate to be treated or an object which in use has a substantially known temperature relation to the substrate to be treated, wherein the measuring object comprises a surface having at least one surface area, which acts as a measuring surface for an optical temperature measurement. A predetermined structure in the form of a plurality of recessions is formed in the surface area, in order to influence the emissivity of the surface area.
申请公布号 US2016131532(A1) 申请公布日期 2016.05.12
申请号 US201414898175 申请日期 2014.06.13
申请人 CENTROTHERM PHOTOVOLTAICS AG 发明人 Zernickel Dieter;Mueller Steffen
分类号 G01J5/08 主分类号 G01J5/08
代理机构 代理人
主权项
地址 Blaubeuren DE