| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing pad with excellent polishing characteristics, a sheet for the polishing pad, and a manufacturing method of polishing material.SOLUTION: A polishing pad 100 includes a polishing layer 101 having a plurality of hollow spheres 111 and a polymer 110. The plurality of hollow spheres 111 have outer shells formed of thermoplastic resin. The polymer 110 contains the plurality of hollow spheres 111, and is generated by polymerization reaction of a prepolymer and a curing agent. The polymer 110 is cured in a shorter time than a time until internal heat storage by the polymerization reaction reaches a maximum temperature.SELECTED DRAWING: Figure 2 |
