| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a physical quantity sensor such that a shift in relative position between a strain detection element and an outline of a diaphram is small and sensitivity of detection of deformation of the diaphram by the strain detection element is improved.SOLUTION: A method of manufacturing a pressure sensor 1 includes: a substrate preparing process of preparing a substrate 40 having a piezoresistive element 20, strained to output a signal, arranged on the side of one surface 40a; a first etching process of etching the substrate 40 from the side of the other surface 40b in top/reverse relation with the one surface 40a including a range overlapping the piezoresistive element 20 in plan view so as to form a first recessed part 41; and a second etching process of dry-etching a bottom part of the recessed part 41 including at least a part of the range overlapping the piezoresistive element 20 in plan view so as to form a second recessed part 42 having a diaphragm 10 at its bottom, a depth H2 of the second recessed part 42 being equal to or less than a depth H1 of the first recessed part 41.SELECTED DRAWING: Figure 3 |
