发明名称 |
DISPLAY DEVICE AND APPARATUS AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz. |
申请公布号 |
US2016133873(A1) |
申请公布日期 |
2016.05.12 |
申请号 |
US201514811729 |
申请日期 |
2015.07.28 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
Huh Myungsoo;Key Sunghun;Kim Sungchul;Roh Cheollae;Jung Sukwon;Joo Hyunwoo;Choi Jaihyuk |
分类号 |
H01L51/52;H01J37/32;H01L51/56 |
主分类号 |
H01L51/52 |
代理机构 |
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代理人 |
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主权项 |
1. A display device comprising:
a substrate; a display unit on the substrate; and an inorganic layer on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. |
地址 |
Yongin-City KR |