| 摘要 |
Provided is an excimer discharge lamp in which an inner tube is restricted to be eccentric with respect to an axial direction of an outer tube, and which has a double-tube structure providing a highly uniform illuminance distribution. The excimer discharge lamp comprises an outer tube, an inner tube disposed coaxially with the outer tube, and a discharge vessel of a double-tube structure with a discharge space between the outer tube and the inner tube, wherein the discharge vessel is made of a dielectric, and one electrode at one side is installed to face an electrode at the opposite side through the discharge vessel. At an end of the outer tube, a hollow tube is formed, and the hollow tube extends outwardly in an axial direction with one end thereof sealed and the inside thereof connected to the inside of the outer tube. At an end of the inner tube, a bulging portion to be inserted into the hollow tube is formed. |
