| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measurement device that can measure a three-dimensional shape of an inner face of a cylindrical measurement object in high speed and with high accuracy.SOLUTION: Light emitted from a white color light source 12 is split into measurement light and reference light by a beam splitter 16 via a collimator 14. The measurement light is enlarged by a telecentric optical system 18, is paralleled, and is deflected at a right angle as maintaining parallelism by a conical prism 20. An inner face of a workpiece W serving as a cylindrical measurement object is irradiated over an entire peripheral direction with the measurement light. A reference mirror 22 movable in an optical axis direction is irradiated with the reference light. The measurement light reflected upon the inner face of the workpiece W and the reference light reflected upon the reference mirror 22 are synthesized by the beam splitter 16, and the interference light in this case is detected by an optical detector 24. On the basis of optical intensity of the interference light to be detected by each light reception element of the optical detector 24, a three-dimensional shape of the inner face of the workpiece W is measured.SELECTED DRAWING: Figure 1 |
