| 发明名称 |
Image Evaluation Method and Charged Particle Beam Device |
| 摘要 |
An image evaluation method includes: a template image acquisition step that designates part of a reference image to acquire a template image; a first comparative image acquisition step that acquires a first comparative image in which the position of the template image is moved in a first direction by a first moving amount relative to the reference image; a first evaluation step that performs a pattern matching process on the template image and the first comparative image and evaluates the template image; a second comparative image acquisition step that acquires a second comparative image in which the position of the template image is moved in a second direction that is orthogonal to the first direction by a second moving amount relative to the reference image; and a second evaluation step that performs the pattern matching process on the template image and the second comparative image and evaluates the template image. |
| 申请公布号 |
US2016133434(A1) |
申请公布日期 |
2016.05.12 |
| 申请号 |
US201514932069 |
申请日期 |
2015.11.04 |
| 申请人 |
JEOL Ltd. |
发明人 |
Kuramoto Tatsuru |
| 分类号 |
H01J37/22;H01J37/285 |
主分类号 |
H01J37/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An image evaluation method that evaluates a template image used for a pattern matching process that is implemented in a charged particle beam device, the image evaluation method comprising:
a template image acquisition step that designates part of a reference image to acquire the template image; a first comparative image acquisition step that acquires a first comparative image in which a position of the template image is moved in a first direction by a first moving amount relative to the reference image; a first evaluation step that performs the pattern matching process on the template image and the first comparative image and evaluates the template image; a second comparative image acquisition step that acquires a second comparative image in which the position of the template image is moved in a second direction that is orthogonal to the first direction by a second moving amount relative to the reference image; and a second evaluation step that performs the pattern matching process on the template image and the second comparative image and evaluates the template image. |
| 地址 |
Tokyo JP |
