发明名称 MANUFACTURING METHOD FOR SUBSTRATE HAVING LYOPHILIC PORTION AND LYOPHOBIC PORTION, COMPOSITION, FORMING METHOD FOR CONDUCTIVE FILM, ELECTRONIC CIRCUIT AND ELECTRONIC DEVICE
摘要 The present invention provides a method for manufacturing a substrate having a lyophilic portion and a lyophobic portion, in which a liquid film forming material is used to form a fixed fine pattern by suppressing moisture from spreading and infiltrating, a composition used in the manufacture of the substrate, a method for forming a conductive film, an electronic circuit, and an electronic device. The method for manufacturing a substrate having a lyophilic portion and a lyophobic portion comprises the processes of: (1) forming a coating film by applying, on a substrate, a composition including (A) a polymer having at least one group selected from a group having an acetal bond or a group having silicon atoms, (B) an acid generator, and (C) a compound different from (A); and (2) irradiating a certain portion of the coating film. The method for forming a conductive film comprises applying a film forming material for formation of a conductive film onto a lyophilic portion formed in the irradiated portion of the coating film on the substrate (1) after the process (2) and heating the film forming material. Using the method for a conductive film, an electronic circuit and an electronic device may be provided.
申请公布号 KR20160052385(A) 申请公布日期 2016.05.12
申请号 KR20150151214 申请日期 2015.10.29
申请人 JSR CORPORATION 发明人 HAMAGUCHI HITOSHI;TANAKA KENROU
分类号 H01L21/02;G03F7/038;G03F7/20;G03F7/40;H01L21/28;H01L51/00 主分类号 H01L21/02
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