MEMS INERTIAL SENSING USING ACOUSTIC WAVES

摘要

A MEMS structure includes a generating diaphragm, one or more wave channels, and one or more sensing diaphragm. A method for inertial sensing comprises driving the generating diaphragm to generate an acoustic wave, passing the acoustic wave through a channel in the MEMS structure to the sensing diaphragm, and measuring a relative phase of the wave at the sensing diaphragm to determine acceleration or rotation of the MEMS structure.

主权项

1. A sensor comprising:
an acoustic wave channel; a first diaphragm that is drivable to generate waves in the acoustic wave channel; and a second diaphragm configured to oscillate in response to acoustic waves reaching the second diaphragm through the acoustic wave channel.