发明名称 PIEZOELECTRIC SENSOR AND PULSATION SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a new use of a piezoelectric sensor, and a piezoelectric sensor having a structural feature applicable to that use.SOLUTION: A piezoelectric sensor 1 includes a flexible substrate 10, and a piezoelectric film 20 formed on the substrate 10. The thickness of the substrate 10 is ts, the thickness of the piezoelectric film 20 is tp, the length of the piezoelectric film 20 in the longitudinal direction is L, and the total thickness of the thickness ts of the substrate 10 and the thickness tp of the piezoelectric film 20 is t. The thickness tp of the piezoelectric film 20 is 20 μm or less. The thickness tp of the piezoelectric film 20 and the thickness ts of the substrate 10 satisfy a relation of ts/tp>1. The total thickness t and the longitudinal length L of the piezoelectric film 20 satisfy a relation of L/t>100. Since a piezoelectric sensor 1 of such a configuration has flexibility, it can be attached to the human body, and used for measuring pulsation.SELECTED DRAWING: Figure 1
申请公布号 JP2016076512(A) 申请公布日期 2016.05.12
申请号 JP20140203985 申请日期 2014.10.02
申请人 RESEARCH INSTITUTE FOR ELECTROMAGNETIC MATERIALS 发明人 KAWAKAMI YOSHIHIRO;HAYASAKA JUNICHI
分类号 H01L41/113;G01L1/16;H01L41/314 主分类号 H01L41/113
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